Authors:
Friedberger, A
Kreisl, P
Muller, G
Kassing, R
Citation: A. Friedberger et al., A versatile and modularizable micromachining process for the fabrication of thermal microsensors and microactuators, J MICROM M, 11(6), 2001, pp. 623-629
Authors:
Bonin, M
Oberstrass, J
Lukacs, N
Ewert, K
Oesterschulze, E
Kassing, R
Nellen, W
Citation: M. Bonin et al., Determination of preferential binding sites for anti-dsRNA antibodies on double-stranded RNA by scanning force microscopy, RNA, 6(4), 2000, pp. 563-570
Citation: M. Noding et al., Diagnostics of SF6 plasmas by energy-resolved mass spectrometry: influenceof the electrode material on internal plasma parameters, SURF COAT, 111(1), 1999, pp. 51-55
Citation: C. Popov et al., Plasma chemical vapor deposition of thin carbon nitride films utilizing transport reactions, THIN SOL FI, 356, 1999, pp. 406-411