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Authors:
Katai, S
Tass, Z
Bori, L
Hars, G
Deak, P
Geelhaar, L
Citation: S. Katai et al., Ion beam mass spectrometer for compositional analysis of plasma assisted surface processes in the pressure range of 1-50 mbar, REV SCI INS, 70(8), 1999, pp. 3324-3328
Citation: S. Katai et al., Measurement of ion energy distributions in the bias enhanced nucleation ofchemical vapor deposited diamond, J APPL PHYS, 86(10), 1999, pp. 5549-5555