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Results: 1
Investigating slurry transport beneath a wafer during chemical mechanical polishing processes
Authors:
Coppeta, J Rogers, C Racz, L Philipossian, A Kaufman, FB
Citation:
J. Coppeta et al., Investigating slurry transport beneath a wafer during chemical mechanical polishing processes, J ELCHEM SO, 147(5), 2000, pp. 1903-1909
Risultati:
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