Authors: Sakoda, T Moise, TS Summerfelt, SR Colombo, L Xing, GQ Gilbert, SR Loke, ALS Ma, SM Kavari, R Wills, LA Amano, J

Citation: T. Sakoda et al., Hydrogen-robust submicron IrOx/Pb(Zr,Ti)O-3/Ir capacitors for embedded ferroelectric memory, JPN J A P 1, 40(4B), 2001, pp. 2911-2916

Authors: Summerfelt, SR Moise, TS Xing, G Colombo, L Sakoda, T Gilbert, SR Loke, ALS Ma, S Wills, LA Kavari, R Hsu, T Amano, J Johnson, ST Vestcyk, DJ Russell, MW Bilodeau, SM van Buskirk, P

Citation: Sr. Summerfelt et al., Demonstration of scaled (>= 0.12 mu m(2)) Pb(Zr,Ti)O-3 capacitors on W plugs with Al interconnect, APPL PHYS L, 79(24), 2001, pp. 4004-4006