Authors: Ashruf, CMA French, PJ Sarro, PM Kazinczi, R Xia, XH Kelly, JJ

Citation: Cma. Ashruf et al., Galvanic etching for sensor fabrication, J MICROM M, 10(4), 2000, pp. 505-515

Authors: Kazinczi, R Mollinger, JR Bossche, A

Citation: R. Kazinczi et al., Versatile tool for characterising long-term stability and reliability of micromechanical structures, SENS ACTU-A, 85(1-3), 2000, pp. 84-89