Authors: Duffy, S Bozler, C Rabe, S Knecht, J Travis, L Wyatt, P Keast, C Gouker, M

Citation: S. Duffy et al., MEMS microswitches for reconfigurable microwave circuitry, IEEE MICR W, 11(3), 2001, pp. 106-108

Authors: Fritze, M Burns, J Wyatt, PW Chen, CK Gouker, P Chen, CL Keast, C Astolfi, D Yost, D Preble, D Curtis, A Davis, P Cann, S Deneault, S Liu, HY

Citation: M. Fritze et al., Sub-100 nm silicon on insulator complimentary metal-oxide semiconductor transistors by deep ultraviolet optical lithography, J VAC SCI B, 18(6), 2000, pp. 2886-2890