Authors: Kechagias, VG Gioti, M Logothetidis, S Benferhat, R Teer, D

Citation: Vg. Kechagias et al., 'Real-time' multiwavelength ellipsometry diagnostics for monitoring dry etching of Si and TiNx deposition, THIN SOL FI, 364(1-2), 2000, pp. 213-219