Authors:
Miyake, S
Shimizu, I
Manory, RR
Mori, T
Kimmel, G
Citation: S. Miyake et al., Structural modifications of hafnium oxide films prepared by ion beam assisted deposition under high energy oxygen irradiation, SURF COAT, 146, 2001, pp. 237-242
Authors:
Raveh, A
Weiss, M
Pinkas, M
Rosen, DZ
Kimmel, G
Citation: A. Raveh et al., Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering, SURF COAT, 114(2-3), 1999, pp. 269-277