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Results: 2
The role of ions and UV radiation in gallium arsenide etching process
Authors: Kirillov, YV Sitanov, DV Svettsov, VI
Citation: Yv. Kirillov et al., The role of ions and UV radiation in gallium arsenide etching process, HIGH ENERG, 34(5), 2000, pp. 326-330
Investigation of the mechanism of formation of chlorine atoms in chlorine-hydrogen plasmas
Authors: Kirillov, YV Sitanov, DV Svettsov, VI
Citation: Yv. Kirillov et al., Investigation of the mechanism of formation of chlorine atoms in chlorine-hydrogen plasmas, HIGH ENERG, 34(3), 2000, pp. 177-181
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