Authors: Goethals, AM Van Roey, F Sugihara, T Van den Hove, L Vertommen, J Klippert, W

Citation: Am. Goethals et al., Dry development in an O-2/SO2 plasma for sub-0.18 mu m top layer imaging processes, J VAC SCI B, 16(6), 1998, pp. 3322-3333