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Citation: Dm. Knotter et Tjj. Denteneer, Etching mechanism of silicon nitride in HF-based solutions, J ELCHEM SO, 148(3), 2001, pp. F43-F46

Authors: Knotter, DM de Gendt, S Mertens, PW Heyns, MM

Citation: Dm. Knotter et al., Silicon surface roughening mechanisms in ammonia hydrogen peroxide mixtures, J ELCHEM SO, 147(2), 2000, pp. 736-740

Authors: Knotter, DM

Citation: Dm. Knotter, Etching mechanism of vitreous silicon dioxide in HF-based solutions, J AM CHEM S, 122(18), 2000, pp. 4345-4351

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Citation: Mm. Heyns et al., Cost-effective cleaning and high-quality thin gate oxides, IBM J RES, 43(3), 1999, pp. 339-350

Authors: Knotter, DM de Gendt, S Baeyens, M Mertens, PW Heyns, HM

Citation: Dm. Knotter et al., Hydrogen peroxide decomposition in ammonia solutions, J ELCHEM SO, 146(9), 1999, pp. 3476-3481