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Results: 1
Low k, porous methyl silsesquioxane and spin-on-glass
Authors:
Kohl, AT Mimna, R Shick, R Rhodes, L Wang, ZL Kohl, PA
Citation:
At. Kohl et al., Low k, porous methyl silsesquioxane and spin-on-glass, EL SOLID ST, 2(2), 1999, pp. 77-79
Risultati:
1-1
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