Authors: Nalamasu, O Houlihan, FM Cirelli, RA Timko, AG Watson, GP Hutton, RS Kometani, JM Reichmanis, E Gabor, A Medina, A Slater, S

Citation: O. Nalamasu et al., 193 nm single layer resist strategies, concepts, and recent results, J VAC SCI B, 16(6), 1998, pp. 3716-3721