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Results: 3

Authors: Chen, CG Heilmann, RK Konkola, PT Mongrard, O Monnelly, GP Schattenburg, ML
Citation: Cg. Chen et al., Microcomb design and fabrication for high accuracy optical assembly, J VAC SCI B, 18(6), 2000, pp. 3272-3276

Authors: Heilmann, RK Konkola, PT Chen, CG Schattenburg, ML
Citation: Rk. Heilmann et al., Relativistic corrections in displacement measuring interferometry, J VAC SCI B, 18(6), 2000, pp. 3277-3281

Authors: Konkola, PT Chen, CG Heilmann, RK Schattenburg, ML
Citation: Pt. Konkola et al., Beam steering system and spatial filtering applied to interference lithography, J VAC SCI B, 18(6), 2000, pp. 3282-3286
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