Authors: Degen, A Abedinov, N Gotszalk, T Sossna, E Kratzenberg, M Rangelow, IW

Citation: A. Degen et al., Stress analysis in Si membranes for open stencil masks and mini-reticles using double bulging and resonance methods, MICROEL ENG, 57-8, 2001, pp. 425-432