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Plasma-sheath resonances and energy absorption phenomena in capacitively coupled radio frequency plasmas. Part I
Authors: Ku, VPT Annaratone, BM Allen, JE
Citation: Vpt. Ku et al., Plasma-sheath resonances and energy absorption phenomena in capacitively coupled radio frequency plasmas. Part I, J APPL PHYS, 84(12), 1998, pp. 6536-6545
Plasma-sheath resonances and energy absorption phenomena in capacitively coupled radio frequency plasmas. Part II. The Herlofson paradox
Authors: Ku, VPT Annaratone, BM Allen, JE
Citation: Vpt. Ku et al., Plasma-sheath resonances and energy absorption phenomena in capacitively coupled radio frequency plasmas. Part II. The Herlofson paradox, J APPL PHYS, 84(12), 1998, pp. 6546-6551
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