Authors: Li, VZQ Mirabedini, MR Vogel, E Henson, K Batchelor, D Wortman, JJ Kuehn, RT

Citation: Vzq. Li et al., Effects of Si source gases (SiH4 and Si2H6) on polycrystalline-Si1-xGex deposited on oxide by RTCVD, EL SOLID ST, 1(3), 1998, pp. 153-155