Authors:
Thomas, J
Kuhnhold, R
Schnupp, R
Ryssel, H
Citation: J. Thomas et al., A silicon vibration sensor for tool state monitoring working in the high acceleration range, SENS ACTU-A, 85(1-3), 2000, pp. 194-201
Authors:
Schnupp, R
Baumgartner, R
Kuhnhold, R
Ryssel, H
Citation: R. Schnupp et al., Electrodeposition of photoresist: optimization of deposition conditions, investigation of lithographic processes and chemical resistance, SENS ACTU-A, 85(1-3), 2000, pp. 310-315
Authors:
Mikolajick, T
Kuhnhold, R
Schnupp, R
Ryssel, H
Citation: T. Mikolajick et al., The influence of surface oxidation on the pH-sensing properties of siliconnitride, SENS ACTU-B, 58(1-3), 1999, pp. 450-455