Authors:
Kulikovsky, V
Bohac, P
Franc, F
Deineka, A
Vorlicek, V
Jastrabik, L
Citation: V. Kulikovsky et al., Hardness, intrinsic stress, and structure of the a-C and a-C : H films prepared by magnetron sputtering, DIAM RELAT, 10(3-7), 2001, pp. 1076-1081