Authors:
Shaginyan, LR
Fendrych, F
Jastrabik, L
Soukup, L
Kulikovsky, VY
Musil, J
Citation: Lr. Shaginyan et al., CNxHy films obtained by ECR plasma activated CVD: The role of substrate bias (DC, RF) and some other deposition parameters in growth mechanisms, SURF COAT, 119, 1999, pp. 65-73