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Citation: Vg. Kutchoukov et al., Patterning of polyimide and metal in deep trenches, SENS ACTU-A, 92(1-3), 2001, pp. 208-213

Authors: Kutchoukov, VG Mollinger, JR Bossche, A

Citation: Vg. Kutchoukov et al., New photoresist coating method for 3-D structured wafers, SENS ACTU-A, 85(1-3), 2000, pp. 377-383