Authors: Gritsenko, VA Wong, H Xu, JB Kwok, RM Petrenko, IP Zaitsev, BA Morokov, YN Novikov, YN

Citation: Va. Gritsenko et al., Excess silicon at the silicon nitride/thermal oxide interface in oxide-nitride-oxide structures, J APPL PHYS, 86(6), 1999, pp. 3234-3240