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Results:
1-7
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Results: 7
Authors:
HURY S
VIDAL DR
DESOR F
PELLETIER J
LAGARDE T
Citation: S. Hury et al., A PARAMETRIC STUDY OF THE DESTRUCTION EFFICIENCY OF BACILLUS SPORES IN LOW-PRESSURE OXYGEN-BASED PLASMAS, Letters in applied microbiology, 26(6), 1998, pp. 417-421
Authors:
LECOEUR F
LAGARDE T
PELLETIER J
AMAL Y
BURKE R
BRUNEL M
Citation: F. Lecoeur et al., DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE PLASMA IMMERSION FOR LARGE-AREA ION-IMPLANTATION (INVITED), Review of scientific instruments, 69(2), 1998, pp. 831-836
Authors:
LAGARDE T
ARNAL Y
PELLETIER J
Citation: T. Lagarde et al., INFLUENCE OF THE APPLIED-FIELD FREQUENCY ON THE CHARACTERISTICS OF ARAND SF6 DIFFUSION PLASMAS SUSTAINED AT ELECTRON-CYCLOTRON-RESONANCE ABOVE MULTIPOLAR MAGNETIC-FIELD STRUCTURES, Plasma sources science & technology, 6(3), 1997, pp. 386-393
Authors:
LAGARDE T
PELLETIER J
ARNAL Y
Citation: T. Lagarde et al., INFLUENCE OF THE MULTIPOLAR MAGNETIC-FIELD CONFIGURATION ON THE DENSITY OF DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE PLASMAS, Plasma sources science & technology, 6(1), 1997, pp. 53-60
Authors:
PELLETIER J
LAGARDE T
ARNAL Y
BURKE R
COCAGNE J
Citation: J. Pelletier et al., MULTIPOLAR MAGNETIC-FIELD STRUCTURES FOR THE SCALING-UP OF HIGH-DENSITY PLASMAS EXCITED IN THE DC TO MICROWAVE FREQUENCY-RANGE AND APPLICABLE TO SPUTTERING AND CHEMICAL-PROCESSING, Surface & coatings technology, 77(1-3), 1995, pp. 770-775
Authors:
ROSTAING JC
COEURET F
PELLETIER J
LAGARDE T
ETEMADI R
Citation: Jc. Rostaing et al., HIGHLY HOMOGENEOUS SILICA COATINGS FOR OPTICAL AND PROTECTIVE APPLICATIONS DEPOSITED BY PECVD AT ROOM-TEMPERATURE IN A PLANAR UNIFORM DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE PLASMA REACTOR, Thin solid films, 270(1-2), 1995, pp. 49-54
Authors:
PELLETIER J
LAGARDE T
Citation: J. Pelletier et T. Lagarde, CHEMICAL-VAPOR-DEPOSITION IN HIGH-DENSITY LOW-PRESSURE PLASMAS - REACTOR SCALE-UP AND PERFORMANCE, Thin solid films, 241(1-2), 1994, pp. 240-246
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