Authors:
RAMM P
BOLLMANN D
BRAUN R
BUCHNER R
CAOMINH U
ENGELHARDT M
ERRMANN G
GRASSL T
HIEBER K
HUBNER H
KAWALA G
KLEINER M
KLUMPP A
KUHN S
LANDESBERGER C
LEZEC H
MUTH M
PAMLER W
POPP R
RENNER E
RUHL G
SANGER A
SCHELER U
SCHERTEL A
SCHMIDT C
SCHWARZL S
WEBER J
WEBER W
Citation: P. Ramm et al., 3-DIMENSIONAL METALLIZATION FOR VERTICALLY INTEGRATED-CIRCUITS (INVITED LECTURE), Microelectronic engineering, 37-8(1-4), 1997, pp. 39-47