Authors:
LEVINSON JA
HAMZA AV
SHAQFEH ESG
BALOOCH M
Citation: Ja. Levinson et al., GROWTH OF SIC FILMS VIA C-60 PRECURSORS AND A MODEL FOR THE PROFILE DEVELOPMENT OF THE SILICON UNDERLAYER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2385-2394
Authors:
LEVINSON JA
SHAQFEH ESG
BALOOCH M
HAMZA AV
Citation: Ja. Levinson et al., ION-ASSISTED ETCHING AND PROFILE DEVELOPMENT OF SILICON IN MOLECULAR CHLORINE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 1902-1912