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GROWTH OF SIC FILMS VIA C-60 PRECURSORS AND A MODEL FOR THE PROFILE DEVELOPMENT OF THE SILICON UNDERLAYER
Authors: LEVINSON JA HAMZA AV SHAQFEH ESG BALOOCH M
Citation: Ja. Levinson et al., GROWTH OF SIC FILMS VIA C-60 PRECURSORS AND A MODEL FOR THE PROFILE DEVELOPMENT OF THE SILICON UNDERLAYER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2385-2394
ION-ASSISTED ETCHING AND PROFILE DEVELOPMENT OF SILICON IN MOLECULAR CHLORINE
Authors: LEVINSON JA SHAQFEH ESG BALOOCH M HAMZA AV
Citation: Ja. Levinson et al., ION-ASSISTED ETCHING AND PROFILE DEVELOPMENT OF SILICON IN MOLECULAR CHLORINE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 1902-1912
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