Authors:
LIAO CP
HUANG TH
LEE CY
TANG D
LAN SM
YANG TN
LIN LF
Citation: Cp. Liao et al., METHOD OF CREATING LOCAL SEMIINSULATING REGIONS ON SILICON-WAFERS FORDEVICE ISOLATION AND REALIZATION OF HIGH-Q INDUCTORS, IEEE electron device letters, 19(12), 1998, pp. 461-462