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Authors: LIAW HM HICKERNELL FS

Citation: Hm. Liaw et Fs. Hickernell, THE CHARACTERIZATION OF SPUTTERED POLYCRYSTALLINE ALUMINUM NITRIDE ONSILICON BY SURFACE-ACOUSTIC-WAVE MEASUREMENTS, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 42(3), 1995, pp. 404-409

Authors: GRUPENSHEMANSKY ME LIAW HM VASQUEZ B SUNDARAM SL

Citation: Me. Grupenshemansky et al., SELECTIVE POLYCRYSTALLINE SILICON GROWTH AND ITS APPLICATIONS TO TRENCH ISOLATION, Journal of the Electrochemical Society, 140(4), 1993, pp. 1110-1117