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Results: 2
STUDY OF END-OF-RANGE LOOP INTERACTIONS WITH B-DOPED DIFFUSION LAYER(IMPLANT DAMAGE USING A BORON)
Authors: LISTEBARGER JK ROBINSON HG JONES KS LAW ME SIELOFF DD SLINKMAN JA SEDGWICK TO
Citation: Jk. Listebarger et al., STUDY OF END-OF-RANGE LOOP INTERACTIONS WITH B-DOPED DIFFUSION LAYER(IMPLANT DAMAGE USING A BORON), Journal of applied physics, 78(4), 1995, pp. 2298-2302
USE OF TYPE-II (END OF RANGE) DAMAGE AS DETECTORS FOR QUANTIFYING INTERSTITIAL FLUXES IN ION-IMPLANTED SILICON
Authors: LISTEBARGER JK JONES KS SLINKMAN JA
Citation: Jk. Listebarger et al., USE OF TYPE-II (END OF RANGE) DAMAGE AS DETECTORS FOR QUANTIFYING INTERSTITIAL FLUXES IN ION-IMPLANTED SILICON, Journal of applied physics, 73(10), 1993, pp. 4815-4819
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