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Results: 1-3 |
Results: 3
PROFILE SIMULATION OF CONFORMALITY OF CHEMICAL-VAPOR-DEPOSITED COPPERIN SUBQUARTER-MICRON TRENCH AND VIA STRUCTURES
Authors: BURKE A BRAECKELMANN G MANGER D EISENBRAUN E KALOYEROS AE MCVITTIE JP HAN J BANG D LOAN JF SULLIVAN JJ
Citation: A. Burke et al., PROFILE SIMULATION OF CONFORMALITY OF CHEMICAL-VAPOR-DEPOSITED COPPERIN SUBQUARTER-MICRON TRENCH AND VIA STRUCTURES, Journal of applied physics, 82(9), 1997, pp. 4651-4660
CHEMICAL-VAPOR-DEPOSITION OF COPPER FROM CU-I HEXAFLUOROACETYLACETONATE TRIMETHYLVINYLSILANE FOR ULTRALARGE SCALE INTEGRATION APPLICATIONS
Authors: BRAECKELMANN G MANGER D BURKE A PETERSON GG KALOYEROS AE REIDSEMA C OMSTEAD TR LOAN JF SULLIVAN JJ
Citation: G. Braeckelmann et al., CHEMICAL-VAPOR-DEPOSITION OF COPPER FROM CU-I HEXAFLUOROACETYLACETONATE TRIMETHYLVINYLSILANE FOR ULTRALARGE SCALE INTEGRATION APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(3), 1996, pp. 1828-1836
IN-SITU QUADRUPOLE MASS-SPECTROSCOPY STUDIES OF WATER AND SOLVENT COORDINATION TO COPPER(II) BETA-DIKETONATE PRECURSORS - IMPLICATIONS FOR THE CHEMICAL-VAPOR-DEPOSITION OF COPPER
Authors: ZHENG B GOLDBERG C EISENBRAUN ET LIU J KALOYEROS AE TOSCANO PJ MURARKA SP LOAN JF SULLIVAN J
Citation: B. Zheng et al., IN-SITU QUADRUPOLE MASS-SPECTROSCOPY STUDIES OF WATER AND SOLVENT COORDINATION TO COPPER(II) BETA-DIKETONATE PRECURSORS - IMPLICATIONS FOR THE CHEMICAL-VAPOR-DEPOSITION OF COPPER, Materials chemistry and physics, 41(3), 1995, pp. 173-181
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