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Authors: MAHFOUD K LOGHMARTI M MULLER JC SIFFERT P

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Authors: LOGHMARTI M MAHFOUD K VENTURA L MULLER JC SAYAH D SIFFERT P

Citation: M. Loghmarti et al., POST-DIFFUSION GETTERING EFFECTS INDUCED IN POLYCRYSTALLINE SILICON, Journal de physique. III, 5(9), 1995, pp. 1365-1370

Authors: LOGHMARTI M MAHFOUD K KOPP J MULLER JC SAYAH D

Citation: M. Loghmarti et al., HIGH PHOSPHORUS GETTERING EFFICIENCY IN POLYCRYSTALLINE SILICON BY OPTIMIZATION OF CLASSICAL THERMAL ANNEALING CONDITIONS, Physica status solidi. a, Applied research, 151(2), 1995, pp. 379-386