Authors: LEVENETS VV BEKLEMISHEV VI KIRILENKO EP MAKHONIN II TRIFONOV AY LOGINOV BA PROTASENKO VV

Citation: Vv. Levenets et al., CHEMICAL-STABILITY OF HBF4-TREATED (100)SI SURFACES, JPN J A P 1, 34(4A), 1995, pp. 1723-1727