Authors: PAK JJ KABIR AE NEUDECK GW LOGSDON JH

Citation: Jj. Pak et al., A BRIDGE-TYPE PIEZORESISTIVE ACCELEROMETER USING MERGED EPITAXIAL LATERAL OVERGROWTH FOR THIN SILICON BEAM FORMATION, Sensors and actuators. A, Physical, 56(3), 1996, pp. 267-271