Authors: CHOI WK HAN LJ LOO FL

Citation: Wk. Choi et al., ELECTRICAL CHARACTERIZATION OF RADIO-FREQUENCY SPUTTERED HYDROGENATEDAMORPHOUS-SILICON CARBIDE FILMS, Journal of applied physics, 81(1), 1997, pp. 276-280

Authors: CHOI WK LOO FL LOH FC TAN KL

Citation: Wk. Choi et al., EFFECTS OF HYDROGEN AND RF POWER ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF RF-SPUTTERED HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS, Journal of applied physics, 80(3), 1996, pp. 1611-1616

Authors: CHOI WK LOO FL LING CH LOH FC TAN KL

Citation: Wk. Choi et al., STRUCTURAL AND ELECTRICAL STUDIES OF RADIO-FREQUENCY SPUTTERED HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS, Journal of applied physics, 78(12), 1995, pp. 7289-7294