Authors:
LUCKOWSKI ED
DELUCCA JM
WILLIAMS JR
MOHNEY SE
BOZACK MJ
ISAACSSMITH T
CROFTON J
Citation: Ed. Luckowski et al., IMPROVED OHMIC CONTACT TO N-TYPE 4H AND 6H SIC USING NICHROME, Journal of electronic materials, 27(4), 1998, pp. 330-334
Authors:
CASADY JB
LUCKOWSKI ED
BOZACK M
SHERIDAN D
JOHNSON RW
WILLIAMS JR
Citation: Jb. Casady et al., ETCHING OF 6H-SIC AND 4H-SIC USING NF3 IN A REACTIVE ION ETCHING SYSTEM, Journal of the Electrochemical Society, 143(5), 1996, pp. 1750-1753