Authors:
SU CC
HOU HQ
LEE GH
DAI ZG
LUO WA
VERNON MF
BENT BE
Citation: Cc. Su et al., IDENTIFICATION OF THE VOLATILE REACTION-PRODUCTS OF THE CL2+GAAS ETCHING REACTION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1222-1242
Authors:
TANG YQ
SHENG ZZ
LUO WA
CHAN IN
CHEN ZY
LI YF
PEDERSON DO
Citation: Yq. Tang et al., PHASE-TRANSFORMATION DURING LOW-TEMPERATURE TL-DIFFUSION IN THE FABRICATION OF TL-BA-CA-CU-O THIN-FILMS, Physica. C, Superconductivity, 214(1-2), 1993, pp. 190-194