Authors:
Jacobsohn, LG
Prioli, R
Freire, FL
Mariotto, G
Lacerda, MM
Chung, YW
Citation: Lg. Jacobsohn et al., Comparative study of anneal-induced modifications of amorphous carbon films deposited by dc magnetron sputtering at different argon plasma pressures, DIAM RELAT, 9(3-6), 2000, pp. 680-684
Authors:
Prioli, R
Zanette, SI
Caride, AO
Lacerda, MM
Freire, FL
Citation: R. Prioli et al., Atomic force microscopy investigation of the effects of annealing on amorphous carbon nitride films deposited by r.f. magnetron sputtering, DIAM RELAT, 8(6), 1999, pp. 993-995
Authors:
Lacerda, MM
Freire, FL
Prioli, R
Lepinski, CM
Mariotto, G
Citation: Mm. Lacerda et al., Effects of thermal annealing on the microstructure and mechanical properties of carbon-nitrogen films deposited by radio frequency-magnetron sputtering, J VAC SCI A, 17(5), 1999, pp. 2811-2818
Authors:
Lacerda, MM
Chen, YH
Zhou, B
Guruz, MU
Chung, YW
Citation: Mm. Lacerda et al., Synthesis of hard TiN coatings with suppressed columnar growth and reducedstress, J VAC SCI A, 17(5), 1999, pp. 2915-2919
Authors:
Jacobsohn, LG
Freire, FL
Franceschini, DF
Lacerda, MM
Mariotto, G
Citation: Lg. Jacobsohn et al., Growth kinetics and relationship between structure and mechanical properties of a-C(N): H films deposited in acetylene-nitrogen atmospheres, J VAC SCI A, 17(2), 1999, pp. 545-551