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Huang, CJ
Lai, WK
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Jin, YJ
Chen, HW
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Authors:
Cheng, HC
Lai, WK
Hwang, CC
Juang, MH
Chu, SC
Liu, TF
Citation: Hc. Cheng et al., Suppression of boron penetration for p(+) stacked poly-Si gates by using inductively coupled N-2 plasma treatment, IEEE ELEC D, 20(10), 1999, pp. 535-537