Authors: Luo, TY Laughery, M Brown, GA Al-Shareef, HN Watt, VHC Karamcheti, A Jackson, MD Huff, HR

Citation: Ty. Luo et al., Effect of H-2 content on reliability of ultrathin in-situ steam generated (ISSG) SiO2, IEEE ELEC D, 21(9), 2000, pp. 430-432