Authors:
Gao, Y
He, S
Alluri, P
Engelhard, M
Lea, AS
Finder, J
Melnick, B
Hance, RL
Citation: Y. Gao et al., Effects of precursors and substrate materials on microstructure, dielectric properties, and step coverage of (Ba, Sr)TiO3 films grown by metalorganicchemical vapor deposition, J APPL PHYS, 87(1), 2000, pp. 124-132