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Modelling effects of surface tension on surface topology in spin coatings for integrated optics and micromechanics
Authors:
Kucherenko, SS Leaver, KD
Citation:
Ss. Kucherenko et Kd. Leaver, Modelling effects of surface tension on surface topology in spin coatings for integrated optics and micromechanics, J MICROM M, 10(3), 2000, pp. 299-308
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