Authors: Tellier, CR Leblois, TG

Citation: Cr. Tellier et Tg. Leblois, Micromachining of quartz plates: Determination of a database by combined stereographic analysis and 3-D simulation of etching shapes, IEEE ULTRAS, 47(5), 2000, pp. 1204-1216

Authors: Leblois, TG Tellier, CR

Citation: Tg. Leblois et Cr. Tellier, Micromachined resonant temperature sensors: Theoretical and experimental results, IEEE ULTRAS, 47(2), 2000, pp. 333-340