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Results: 1
Porous alumina as low-epsilon insulator for multilevel metallization
Authors:
Lazarouk, S Katsouba, S Leshok, A Demianovich, A Stanovski, V Voitech, S Vysotski, V Ponomar, V
Citation:
S. Lazarouk et al., Porous alumina as low-epsilon insulator for multilevel metallization, MICROEL ENG, 50(1-4), 2000, pp. 321-327
Risultati:
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