Authors: Lazarouk, S Katsouba, S Leshok, A Demianovich, A Stanovski, V Voitech, S Vysotski, V Ponomar, V

Citation: S. Lazarouk et al., Porous alumina as low-epsilon insulator for multilevel metallization, MICROEL ENG, 50(1-4), 2000, pp. 321-327