Citation: A. Levesque et A. Bouteville, Investigation of the tantalum chlorination with hydrogen chloride for LPCVD tantalum elaboration, J PHYS IV, 11(PR3), 2001, pp. 907-913
Citation: A. Levesque et A. Bouteville, Evaluation of corrosion behaviour of tantalum coating obtained by low pressure chemical vapor deposition using electrochemical polarization, J PHYS IV, 11(PR3), 2001, pp. 915-920