Citation: Hm. Liaw et al., Influence of the AlN buffer layer growth on AlGaN/GaN films deposited on (111)Si substrates, SOL ST ELEC, 45(3), 2001, pp. 417-421
Authors:
Liaw, HM
Doyle, R
Fejes, PL
Zollner, S
Konkar, A
Linthicum, KJ
Gehrke, T
Davis, RF
Citation: Hm. Liaw et al., Crystallinity and microstructures of aluminum nitride films deposited on Si(111) substrates, SOL ST ELEC, 44(4), 2000, pp. 747-755