Authors: Linder, BP Cheung, NW

Citation: Bp. Linder et Nw. Cheung, Modeling of energy distributions for plasma implantation, SURF COAT, 136(1-3), 2001, pp. 132-137

Authors: Linder, BP En, WG Cheung, NW

Citation: Bp. Linder et al., The effect of subsurface doping on gate oxide charging damage, IEEE PLAS S, 26(6), 1998, pp. 1628-1634