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Authors:
Lippert, T
Wei, J
Wokaun, A
Hoogen, N
Nuyken, O
Citation: T. Lippert et al., Development and structuring of combined positive-negative/negative-positive resists using laser ablation as positive dry etching technique, MACRO MAT E, 283(10), 2000, pp. 140-143
Authors:
Bali, GS
Bolder, B
Eicker, N
Lippert, T
Orth, B
Ueberholz, P
Schilling, K
Struckmann, T
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