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Results:
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Results: 1
Fluorine barrier properties of bias-sputtered tungsten films
Authors:
Herner, SB Zhang, HM Sun, B Tanaka, Y Shi, W Yang, SX Lum, R Littau, KA Saleh, A
Citation:
Sb. Herner et al., Fluorine barrier properties of bias-sputtered tungsten films, J ELCHEM SO, 147(5), 2000, pp. 1936-1939
Risultati:
1-1
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