Authors: Low, CH Chin, WS Tan, KL Loh, FC Zhou, MS Zhong, QH Chan, LH

Citation: Ch. Low et al., Characterization of Si(100) surface after high density HBr/Cl-2/O-2 plasmaetching, JPN J A P 1, 39(1), 2000, pp. 14-19

Authors: Han, LJ Ong, TY Prakash, S Chua, LG Choi, WK Tan, LS Loh, FC Tan, KL

Citation: Lj. Han et al., Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f.sputtered amorphous silicon carbide films, THIN SOL FI, 344, 1999, pp. 441-444